ESD Audit Checklist

Grounding/General ESD Controls

1. Is there a common ESD ground for the entire plant
2. Is ESD protective flooring used in ESD controlled areas where the personnel are mobile while handling ESD sensitive items
3. Where ESD protective flooring is used, is the flooring grounded to the plant's common ESD ground
4. Is the ESD protective flooring grounded properly at prescribed intervals

M1. Measure the resistivity of the ESD protective flooring; Spec: 0-1e5 Ohms/Square
M2. Measure field voltages at different areas of the floor; Spec: < 200V
M3. Measure the resistance between a flooring ground point and the common ESD ground; Spec: < 1 Ohm

1. Where ESD protective flooring is used for personnel grounding, are foot grounding devices or conductive footwear worn
2. Where conductive footwear is used, do personnel check continuity to ground upon entering the area

M4. Measure the resistivity of the conductive shoes; Spec: 0-1e5 Ohms/Square

1. Are the ground points of all workstations grounded to the common ESD ground of the plant

M5. Measure the resistance between a workstation ESD ground point and the common ESD ground; Spec: < 1 Ohm

1. Are personnel wearing grounded wrist straps at the ESD-protected workstations
2. Are personnel checking their wrist straps for continuity at regular intervals and are the results of these checks logged consistently and kept
3. Where used, are continuous ground monitors checked and maintained periodically
4. Are the wrist strap/conductive footwear checkers checked and maintained regularly
5. Do wrist straps and foot grounders fit correctly
6. Are wrist straps and foot grounders working properly
7. Are disposable foot grounders limited to one-time use
8. Do personnel wear ESD protective garments or smocks in ESD controlled areas
9. Are ESD protective garments correctly worn

M6. Measure the resistivity of the ESD protective garment/smock; Spec: 0-1e5 Ohms/Square

1. Are the ground points of all equipment grounded to the common ESD ground of the plant

M7. Measure the resistances between equipment ESD ground points and the common ESD ground; Spec: < 1 Ohm
M8. Measure field voltages around the equipment; Spec: < 200V

1. Are non-grounded personnel at least 4 feet away from any ESD sensitive area
2. Are charge-generating equipment at least 4 feet away from any ESD sensitive area
3. Is the surface of the worktable where ESD-sensitive devices are handled covered with a static dissipative mat
4. Is the static dissipative mat on the table properly grounded to the ESD common ground at prescribed intervals

M9. Measure the resistivity of the worktable surface; Spec: 1e5-1e9 Ohms/Square
M10. Measure the resistance of the dissipative mat ground point to the common ESD ground; Spec: < 1 Ohm
M11. Measure field voltages at different areas of the worktable surface; Spec: < 200V

1. Are the ground points of workstations and equipment properly labeled as such
2. Does the plant have a prescribed procedure and frequency for cleaning their ESD protective flooring/surfaces to maintain their conductive/dissipative properties
3. Are there any non-essential personal items in the ESD controlled areas

M12. Measure field voltages around any non-essential personal items; Spec: < 200V

1. Are there any insulative materials in ESD controlled areas, e.g., plastic bags, plastic envelopes, plastic folders, boxes
2. Where insulative materials are present in ESD controlled areas, are ionizers in use
3. Where ionizers are in use, are these ionizers properly positioned and distributed to provide adequate ESD protection
4. Where ionizers are in use, are these ionizers being checked and maintained regularly

M13. Measure field voltages around any insulative/triboelectric items in the workplace; Spec: < 200V

1. Is the RH of ESD controlled areas maintained above 40% and is the RH in these areas monitored

Storage/Stationing/Transfer of Materials

1. Are storage racks or cabinets conductive, but covered with dissipative liners in areas contacting ESD sensitive items
2. Are the conductive storage racks or cabinets individually grounded to the common ESD ground

M14. Measure the resistance of the rack/cabinet ground point to the common ESD ground; Spec: < 1 Ohm

1. Is each level of a storage rack or cabinet grounded to the other levels